Browsing by Subject "B01D 67/0065"

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    • Method of producing a silicon film with micropores 
      Parker, Donald L.; Hall, Kenneth R.; Holste, James C. (United States. Patent and Trademark Office; Texas A&M University. Libraries, 1989-01-31)
      The present invention relates to a method of producing micropores having diameters of less than 20 nanometers in straight sides in silicon film. The silicon film produced by this process may be attached to a substrate ...